The curve fitting of Si 2p and O 1s peaks after this particular laser treatment shows the degree of conversion of organic to inorganic silicon that takes place during the irradiation. This value is significantly higher than those reported for PDMS and PPMS, suggesting a linkage of silicon to a more electronegative element like oxygen. Accordingly, a shift by 0.4 eV is noticed of the O 1s peak, which reflects again a stronger oxidation of silicon. Si2p peaks were almost symmetrical and fitted with a single peak due to the unresolved doublet (Si2p 3/2 Si2p 1/2) and centred at 102.2102.7 eV. AFM images show an average surface roughness of 0.12- 0.15 nm among all three aminosilane films. The position of Si 2p peaks of the treated samples is close to the value of non-treated except that irradiated by 1064 nm 66 pulses, which is shifted by 0.9 eV. XPS data further indicate that the N1s/Si2p ratio is higher after CVD with the trifunctional silane (APTES) compared to the monofunctional ones, with a higher N1s/Si2p ratio for APDMES compared to that for APDIPES. The spectra of detail XPS scans illustrate the influence of the laser treatment. Deconvolution of the O 1s and Si 2p XPS peaks were performed to determine. The XPS surface survey spectra indicate the constituent elements of PDMS: carbon, oxygen and silicon. X-ray photoelectron spectroscopy (XPS) and static contact angle measurements. The μ-Raman spectra are variable taken in different inspected points in the trenches formed by laser treatment. In addition, broad bands appear assigned to D band of amorphous carbon and G band of microcrystalline and polycrystalline graphite. The μ-Raman spectroscopy analyses reveal as irradiation result a new sharp peak of crystalline silicon. Data about the chemical status of poly(dimethylsiloxane) (PDMS) after nanosecond Q-switched Nd:YAG laser treatment with near infrared, visible and ultraviolet radiation are presented.
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